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Surface processes of selective growth by atomic layer epitaxy

Isshiki, H. / Aoyagi, Y. / Sugano, T. / Iwai, S.

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Surface processes of selective growth by atomic layer epitaxy

Isshiki, H. / Aoyagi, Y. / Sugano, T. / Iwai, S.

Surface processes of selective growth by atomic layer epitaxy

Isshiki, H. / Aoyagi, Y. / Sugano, T. / Iwai, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

Surface processes of selective growth by atomic layer epitaxy

Contributors:

Isshiki, H. (author) / Aoyagi, Y. (author) / Sugano, T. (author) / Iwai, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 82/83 ; 57

Publication date:

1994-01-01

Size:

57 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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