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Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

Bi, M. / Ruiz, A. M. / Gornushkin, I. / Smith, B. W. / Winefordner, J. D.

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Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

Bi, M. / Ruiz, A. M. / Gornushkin, I. / Smith, B. W. / Winefordner, J. D.

Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

Bi, M. / Ruiz, A. M. / Gornushkin, I. / Smith, B. W. / Winefordner, J. D.

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Check availability in my library

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Document information

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Document information

Title:

Profiling of patterned metal layers by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS)

Contributors:

Bi, M. (author) / Ruiz, A. M. (author) / Gornushkin, I. (author) / Smith, B. W. (author) / Winefordner, J. D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 158 ; 197-204

Publication date:

2000-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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