Surface oxidation of aluminium nitride thin films: Fid-Bau Portal

Surface oxidation of aluminium nitride thin films

Watanabe, Y. / Hara, Y. / Tokuda, T. / Kitazawa, N. / Nakamura, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Surface oxidation of aluminium nitride thin films

Watanabe, Y. / Hara, Y. / Tokuda, T. / Kitazawa, N. / Nakamura, Y.

Surface oxidation of aluminium nitride thin films

Watanabe, Y. / Hara, Y. / Tokuda, T. / Kitazawa, N. / Nakamura, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Surface oxidation of aluminium nitride thin films

Contributors:

Watanabe, Y. (author) / Hara, Y. (author) / Tokuda, T. (author) / Kitazawa, N. (author) / Nakamura, Y. (author)

Published in:

SURFACE ENGINEERING -LONDON- ; 16 ; 211-214

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0267-0844

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

Kotula, P. G. / Carter, C. B. / Norton, M. G. | British Library Online Contents | 1994

Oxidation of aluminium nitride

Osborne, E. W. / Norton, M. G. | British Library Online Contents | 1998

Oxidation of aluminium nitride substrates

Robinson, D. / Dieckmann, R. | British Library Online Contents | 1994

Aluminium nitride thin films prepared by ion beam assisted deposition method

Watanabe, Y. | British Library Online Contents | 1998

Novel Aluminium Nitride Surface Coatings Formed on Aluminium

Kent, D. / Schaffer, G.B. / Drennan, J. | British Library Online Contents | 2007