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Structural and electric properties of TiB2 thin films by RF sputtering

Shutou, A. / Matsui, T. / Tsuda, H. / Mabuchi, H. / Morii, K.

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Structural and electric properties of TiB2 thin films by RF sputtering

Shutou, A. / Matsui, T. / Tsuda, H. / Mabuchi, H. / Morii, K.

Structural and electric properties of TiB2 thin films by RF sputtering

Shutou, A. / Matsui, T. / Tsuda, H. / Mabuchi, H. / Morii, K.

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Order at Subito €

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Document information

Title:

Structural and electric properties of TiB2 thin films by RF sputtering

Contributors:

Shutou, A. (author) / Matsui, T. (author) / Tsuda, H. (author) / Mabuchi, H. (author) / Morii, K. (author)

Published in:

MATERIALS LETTERS ; 45 ; 143-148

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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