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    Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

    New search for: Koh, M.
    New search for: Sawara, S.
    New search for: Shinada, T.
    New search for: Goto, T.
    New search for: Ando, Y.
    New search for: Ohdomari, I.

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    Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

    New search for: Koh, M.
    New search for: Sawara, S.
    New search for: Shinada, T.
    New search for: Goto, T.
    New search for: Ando, Y.
    New search for: Ohdomari, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

    New search for: Koh, M.
    New search for: Sawara, S.
    New search for: Shinada, T.
    New search for: Goto, T.
    New search for: Ando, Y.
    New search for: Ohdomari, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

    Contributors:

    Koh, M. (author) / Sawara, S. (author) / Shinada, T. (author) / Goto, T. (author) / Ando, Y. (author) / Ohdomari, I. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 162/163 ; 599-603

    Publication date:

    2000-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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