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Nitridation of an InP(001) surface by nitrogen ion beams

Suzuki, Y. / Kumano, H. / Tomota, W. / Sanada, N. / Fukuda, Y.

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Nitridation of an InP(001) surface by nitrogen ion beams

Suzuki, Y. / Kumano, H. / Tomota, W. / Sanada, N. / Fukuda, Y.

Nitridation of an InP(001) surface by nitrogen ion beams

Suzuki, Y. / Kumano, H. / Tomota, W. / Sanada, N. / Fukuda, Y.

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Document information

Title:

Nitridation of an InP(001) surface by nitrogen ion beams

Contributors:

Suzuki, Y. (author) / Kumano, H. (author) / Tomota, W. (author) / Sanada, N. (author) / Fukuda, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 162/163 ; 172-177

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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