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Nitrogen- and ammonia-plasma nitridation of hydrogenated amorphous silicon

Masuda, A. / Yoshimoto, S. / Yonezawa, Y. / Morimoto, A. / Kumeda, M. / Shimizu, T.

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Nitrogen- and ammonia-plasma nitridation of hydrogenated amorphous silicon

Masuda, A. / Yoshimoto, S. / Yonezawa, Y. / Morimoto, A. / Kumeda, M. / Shimizu, T.

Nitrogen- and ammonia-plasma nitridation of hydrogenated amorphous silicon

Masuda, A. / Yoshimoto, S. / Yonezawa, Y. / Morimoto, A. / Kumeda, M. / Shimizu, T.

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Check availability in my library

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Document information

Title:

Nitrogen- and ammonia-plasma nitridation of hydrogenated amorphous silicon

Contributors:

Masuda, A. (author) / Yoshimoto, S. (author) / Yonezawa, Y. (author) / Morimoto, A. (author) / Kumeda, M. (author) / Shimizu, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 610-613

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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