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    Pinhole Defects Evaluation of TiN films Prepared by Dynamic Ion Beam Mixing Method

    New search for: Nagasaka, H.
    New search for: Sugimoto, K.

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    Pinhole Defects Evaluation of TiN films Prepared by Dynamic Ion Beam Mixing Method

    New search for: Nagasaka, H.
    New search for: Sugimoto, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Pinhole Defects Evaluation of TiN films Prepared by Dynamic Ion Beam Mixing Method

    New search for: Nagasaka, H.
    New search for: Sugimoto, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Pinhole Defects Evaluation of TiN films Prepared by Dynamic Ion Beam Mixing Method

    Contributors:

    Nagasaka, H. (author) / Sugimoto, K. (author)

    Published in:

    CORROSION ENGINEERING -TOKYO- ; 49 ; 553-556

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0917-0480

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11223

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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