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    Electrochemical evaluation of pinhole defects in TiN films prepared by r.f. reactive sputtering

    New search for: Uchida, H.
    New search for: Inoue, S.
    New search for: Koterazawa, K.
    New search for: Lukas, P.

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    Electrochemical evaluation of pinhole defects in TiN films prepared by r.f. reactive sputtering

    New search for: Uchida, H.
    New search for: Inoue, S.
    New search for: Koterazawa, K.
    New search for: Lukas, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrochemical evaluation of pinhole defects in TiN films prepared by r.f. reactive sputtering

    New search for: Uchida, H.
    New search for: Inoue, S.
    New search for: Koterazawa, K.
    New search for: Lukas, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Electrochemical evaluation of pinhole defects in TiN films prepared by r.f. reactive sputtering

    Contributors:

    Uchida, H. (author) / Inoue, S. (author) / Koterazawa, K. (author) / Lukas, P.

    Published in:

    11th International Conference on the Strength of Materials ; 649-652

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 234/236

    Publication date:

    1997-01-01

    Size:

    4 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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