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Regrowth of heavy-ion implantation damage by electron beams

Jencic, I. / Robertson, I. M.

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Regrowth of heavy-ion implantation damage by electron beams

Jencic, I. / Robertson, I. M.

Regrowth of heavy-ion implantation damage by electron beams

Jencic, I. / Robertson, I. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Regrowth of heavy-ion implantation damage by electron beams

Contributors:

Jencic, I. (author) / Robertson, I. M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 311-315

Publication date:

2000-01-01

Size:

5 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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