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    Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry

    New search for: Hummel, R. E.

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    Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry

    New search for: Hummel, R. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry

    New search for: Hummel, R. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry

    Contributors:

    Hummel, R. E. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 253 ; 50-61

    Publication date:

    1998-01-01

    Size:

    12 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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