Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps: Fid-Bau Portal

Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps

Zhang, J. Y. / Hopp, B. / Geretovszky, Z. / Boyd, I. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps

Zhang, J. Y. / Hopp, B. / Geretovszky, Z. / Boyd, I. W.

Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps

Zhang, J. Y. / Hopp, B. / Geretovszky, Z. / Boyd, I. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Photo-deposition of tantalum pentoxide film using 222 nm excimer lamps

Contributors:

Zhang, J. Y. (author) / Hopp, B. (author) / Geretovszky, Z. (author) / Boyd, I. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 168 ; 307-311

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Zhang, J. Y. / Lim, B. / Boyd, I. W. | British Library Online Contents | 2000

Growth of tantalum pentoxide film by pulsed laser deposition

Zhang, J.-Y. / Fang, Q. / Boyd, I. W. | British Library Online Contents | 1999

Silica film preparation by chemical vapor deposition using vacuum ultraviolet excimer lamps

Kurosawa, K. / Takezoe, N. / Yanagida, H. et al. | British Library Online Contents | 2000

A high rate of chemical vapor deposition of tantalum pentoxide film initiated by photoexcitation

Tanimoto, S. / Shibata, N. / Kuroiwa, K. et al. | British Library Online Contents | 1994

Tantalum Pentoxide as a Material for Biosensors: Deposition, Properties and Applications

Kulisch, W. / Gilliland, D. / Ceccone, G. et al. | British Library Conference Proceedings | 2009