Surface charge analysis characterisation of ultraviolet-induced damage in silicon nitride dielectrics: Fid-Bau Portal

Surface charge analysis characterisation of ultraviolet-induced damage in silicon nitride dielectrics

Korowicz, D. H. / Kelly, P. V. / Mongey, K. F. / Crean, G. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Surface charge analysis characterisation of ultraviolet-induced damage in silicon nitride dielectrics

Korowicz, D. H. / Kelly, P. V. / Mongey, K. F. / Crean, G. M.

Surface charge analysis characterisation of ultraviolet-induced damage in silicon nitride dielectrics

Korowicz, D. H. / Kelly, P. V. / Mongey, K. F. / Crean, G. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Surface charge analysis characterisation of ultraviolet-induced damage in silicon nitride dielectrics

Contributors:

Korowicz, D. H. (author) / Kelly, P. V. (author) / Mongey, K. F. (author) / Crean, G. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 168 ; 304-306

Publication date:

2000-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Boyd, I. W. | British Library Online Contents | 1995

Surface Photo-Charge Effect in Dielectrics

Ivanov, O. / Mihailov, V. / Pustovoit, V. et al. | British Library Online Contents | 1994

Microstructural Characterisation of Silicon Nitride-bonded Silicon Carbide

Edwards, D. P. / Muddle, B. C. / Hannink, R. H. J. | British Library Online Contents | 1994

Experimental characterisation of FIB induced lateral damage on silicon carbide samples

Stumpf, Florian / Rumler, Maximilian / Abu Quba, Abd Alaziz et al. | DataCite | 2015

Fabrication of Porous Silicon Nitride and Characterisation of Mechanical Properties

Diaz, A. / Hampshire, S. | British Library Online Contents | 2003