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Excimer laser fabrication of diffractive optical elements

Winfield, R. J. / Meister, M. / Crean, G. M. / Paineau, S.

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Excimer laser fabrication of diffractive optical elements

Winfield, R. J. / Meister, M. / Crean, G. M. / Paineau, S.

Excimer laser fabrication of diffractive optical elements

Winfield, R. J. / Meister, M. / Crean, G. M. / Paineau, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer laser fabrication of diffractive optical elements

Contributors:

Winfield, R. J. (author) / Meister, M. (author) / Crean, G. M. (author) / Paineau, S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 481-486

Publication date:

2000-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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