Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics: Fid-Bau Portal

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Flury, M. / Benatmane, A. / Gerard, P. / Montgomery, P. C. / Fontaine, J. / Engel, T. / Schunck, J. P. / Fogarassy, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Flury, M. / Benatmane, A. / Gerard, P. / Montgomery, P. C. / Fontaine, J. / Engel, T. / Schunck, J. P. / Fogarassy, E.

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Flury, M. / Benatmane, A. / Gerard, P. / Montgomery, P. C. / Fontaine, J. / Engel, T. / Schunck, J. P. / Fogarassy, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Contributors:

Flury, M. (author) / Benatmane, A. (author) / Gerard, P. (author) / Montgomery, P. C. (author) / Fontaine, J. (author) / Engel, T. (author) / Schunck, J. P. (author) / Fogarassy, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 238-244

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Braun, A. / Zimmer, K. | British Library Online Contents | 2002

Excimer laser fabrication of diffractive optical elements

Winfield, R. J. / Meister, M. / Crean, G. M. et al. | British Library Online Contents | 2000

Excimer Laser Fabrication of Low Cost Diffractive Optical Elements

Flury, M. / Fontaine, J. / Gerard, P. et al. | British Library Online Contents | 2001

Polymer resist materials for excimer ablation lithography

Suzuki, K. / Matsuda, M. / Hayashi, N. | British Library Online Contents | 1998

Excimer laser ablation of polymers and glasses for grating fabrication

Dyer, P. E. / Farley, R. J. / Giedl, R. et al. | British Library Online Contents | 1996