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New types of microlens arrays for the IR based on inorganic chalcogenide photoresists
New types of microlens arrays for the IR based on inorganic chalcogenide photoresists
New types of microlens arrays for the IR based on inorganic chalcogenide photoresists
Eisenberg, N. P. (author) / Manevich, M. (author) / Noach, S. (author) / Klebanov, M. (author) / Lyubin, V. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 443-448
2000-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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