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Optical study of porous silicon buried waveguides fabricated from p-type silicon

Charrier, J. / Lupi, C. / Haji, L. / Boisrobert, C.

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Optical study of porous silicon buried waveguides fabricated from p-type silicon

Charrier, J. / Lupi, C. / Haji, L. / Boisrobert, C.

Optical study of porous silicon buried waveguides fabricated from p-type silicon

Charrier, J. / Lupi, C. / Haji, L. / Boisrobert, C.

Access

Access via TIB

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Order at Subito €

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Document information

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Document information

Title:

Optical study of porous silicon buried waveguides fabricated from p-type silicon

Contributors:

Charrier, J. (author) / Lupi, C. (author) / Haji, L. (author) / Boisrobert, C. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 357-361

Publication date:

2000-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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