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Control of Surface Morphologies for Epitaxial Growth on Low Off-Angle 4H-SiC (0001) Substrates
Control of Surface Morphologies for Epitaxial Growth on Low Off-Angle 4H-SiC (0001) Substrates
Control of Surface Morphologies for Epitaxial Growth on Low Off-Angle 4H-SiC (0001) Substrates
Masahara, K. (author) / Kushibe, M. (author) / Ohno, H. (author) / Kojima, K. (author) / Takahashi, T. (author) / Ishida, Y. (author) / Suzuki, T. (author) / Tanaka, T. (author) / Yoshida, S. (author) / Arai, K. (author)
MATERIALS SCIENCE FORUM ; 353/356 ; 135-138
2001-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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