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Plasma-Assisted Molecular Beam Epitaxial Growth of AlN Films on Vicinal Sapphire (0001) Substrates
Plasma-Assisted Molecular Beam Epitaxial Growth of AlN Films on Vicinal Sapphire (0001) Substrates
Plasma-Assisted Molecular Beam Epitaxial Growth of AlN Films on Vicinal Sapphire (0001) Substrates
Shen, X. Q. (author) / Okumura, H. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 1553-1556
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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