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Precipitate Formation in Heavily Al-Doped 4H-SiC Layers

Linnarsson, M. K. / Persson, P. O. A. / Bleichner, H. / Janson, M. S. / Zimmermann, U. / Andersson, H. / Karlsson, S. / Yakimova, R. / Hultman, L. / Svensson, B. G.

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Precipitate Formation in Heavily Al-Doped 4H-SiC Layers

Linnarsson, M. K. / Persson, P. O. A. / Bleichner, H. / Janson, M. S. / Zimmermann, U. / Andersson, H. / Karlsson, S. / Yakimova, R. / Hultman, L. / Svensson, B. G.

Precipitate Formation in Heavily Al-Doped 4H-SiC Layers

Linnarsson, M. K. / Persson, P. O. A. / Bleichner, H. / Janson, M. S. / Zimmermann, U. / Andersson, H. / Karlsson, S. / Yakimova, R. / Hultman, L. / Svensson, B. G.

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Title:

Precipitate Formation in Heavily Al-Doped 4H-SiC Layers

Contributors:

Linnarsson, M. K. (author) / Persson, P. O. A. (author) / Bleichner, H. (author) / Janson, M. S. (author) / Zimmermann, U. (author) / Andersson, H. (author) / Karlsson, S. (author) / Yakimova, R. (author) / Hultman, L. (author) / Svensson, B. G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 583-586

Publication date:

2001-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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