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    Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

    New search for: Panknin, D.
    New search for: Gebel, T.
    New search for: Skorupa, W.

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    Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

    New search for: Panknin, D.
    New search for: Gebel, T.
    New search for: Skorupa, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

    New search for: Panknin, D.
    New search for: Gebel, T.
    New search for: Skorupa, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

    Contributors:

    Panknin, D. (author) / Gebel, T. (author) / Skorupa, W. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 353/356 ; 587-590

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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