Microstructure and mechanical properties of polycrystalline NbN/TaN superlattice films: Fid-Bau Portal

Microstructure and mechanical properties of polycrystalline NbN/TaN superlattice films

Xu, J. / Gu, M. / Li, G.

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Microstructure and mechanical properties of polycrystalline NbN/TaN superlattice films

Xu, J. / Gu, M. / Li, G.

Microstructure and mechanical properties of polycrystalline NbN/TaN superlattice films

Xu, J. / Gu, M. / Li, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructure and mechanical properties of polycrystalline NbN/TaN superlattice films

Contributors:

Xu, J. (author) / Gu, M. (author) / Li, G. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 35 ; 3535-3538

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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