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Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films
Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films
Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films
Chu, X. (author) / Wong, M. S. (author) / Sproul, W. D. (author) / Barnett, S. A. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 2500-2507
1999-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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