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The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
Igasaki, Y. (author) / Naito, T. (author) / Murakami, K. (author) / Tomoda, W. (author)
APPLIED SURFACE SCIENCE ; 169-170 ; 512-516
2001-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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