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The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
The effects of deposition conditions on the structural properties of ZnO sputtered films on sapphire substrates
Igasaki, Y. (Autor:in) / Naito, T. (Autor:in) / Murakami, K. (Autor:in) / Tomoda, W. (Autor:in)
APPLIED SURFACE SCIENCE ; 169-170 ; 512-516
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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