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    Thin film properties by facing targets sputtering system

    New search for: Kim, K. H.
    New search for: Son, I. H.
    New search for: Song, K. B.
    New search for: Kong, S. H.
    New search for: Keum, M. J.
    New search for: Nakagawa, S.
    New search for: Naoe, M.

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    Thin film properties by facing targets sputtering system

    New search for: Kim, K. H.
    New search for: Son, I. H.
    New search for: Song, K. B.
    New search for: Kong, S. H.
    New search for: Keum, M. J.
    New search for: Nakagawa, S.
    New search for: Naoe, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thin film properties by facing targets sputtering system

    New search for: Kim, K. H.
    New search for: Son, I. H.
    New search for: Song, K. B.
    New search for: Kong, S. H.
    New search for: Keum, M. J.
    New search for: Nakagawa, S.
    New search for: Naoe, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thin film properties by facing targets sputtering system

    Contributors:

    Kim, K. H. (author) / Son, I. H. (author) / Song, K. B. (author) / Kong, S. H. (author) / Keum, M. J. (author) / Nakagawa, S. (author) / Naoe, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 169-170 ; 410-414

    Publication date:

    2001-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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