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Various properties of sputter-deposited Ta-Ru thin films

Wuu, D. S. / Horng, R. H. / Chang, C. C. / Wu, Y. Y.

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Various properties of sputter-deposited Ta-Ru thin films

Wuu, D. S. / Horng, R. H. / Chang, C. C. / Wu, Y. Y.

Various properties of sputter-deposited Ta-Ru thin films

Wuu, D. S. / Horng, R. H. / Chang, C. C. / Wu, Y. Y.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Various properties of sputter-deposited Ta-Ru thin films

Contributors:

Wuu, D. S. (author) / Horng, R. H. (author) / Chang, C. C. (author) / Wu, Y. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 169-170 ; 392-395

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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