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Reactively sputter-deposited Mo-Ox-Ny thin films

Shen, Y. G. / Mai, Y. W.

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Reactively sputter-deposited Mo-Ox-Ny thin films

Shen, Y. G. / Mai, Y. W.

Reactively sputter-deposited Mo-Ox-Ny thin films

Shen, Y. G. / Mai, Y. W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reactively sputter-deposited Mo-Ox-Ny thin films

Contributors:

Shen, Y. G. (author) / Mai, Y. W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 95 ; 222 - 229

Publication date:

2002-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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