Structure and electrical property of platinum film biased dc-sputter-deposited on silicon: Fid-Bau Portal

Structure and electrical property of platinum film biased dc-sputter-deposited on silicon

Kojima, D. / Makihara, K. / Shi, J. / Hashimoto, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Structure and electrical property of platinum film biased dc-sputter-deposited on silicon

Kojima, D. / Makihara, K. / Shi, J. / Hashimoto, M.

Structure and electrical property of platinum film biased dc-sputter-deposited on silicon

Kojima, D. / Makihara, K. / Shi, J. / Hashimoto, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Structure and electrical property of platinum film biased dc-sputter-deposited on silicon

Contributors:

Kojima, D. (author) / Makihara, K. (author) / Shi, J. (author) / Hashimoto, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 169-170 ; 320-324

Publication date:

2001-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Fu, T. / Zheng, Y. / Shen, Y. G. | British Library Online Contents | 2008

Processing Effects on Structure-Property Relationships in Sputter Deposited Thin Gold Films

Moody, N. R. / Adams, D. P. / Medlin, D. et al. | British Library Online Contents | 2003

Mechanical properties of sputter-deposited nanocrystalline Cr3Si film

Xu, J. / Sun, J. / Jiang, S. | British Library Online Contents | 2009

Growth mode of Pt1-xNix films biased dc-sputter-deposited on MgO(0 0 1)

Amatatsu, Y. / Makihara, K. / Shi, J. et al. | British Library Online Contents | 2001

Cell adhesion on NiTi thin film sputter-deposited meshes

Loger, K. / Engel, A. / Haupt, J. et al. | British Library Online Contents | 2016