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Interface structure of sputter deposited CNx film on silicon substrate

Fu, T. / Zheng, Y. / Shen, Y. G.

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Interface structure of sputter deposited CNx film on silicon substrate

Fu, T. / Zheng, Y. / Shen, Y. G.

Interface structure of sputter deposited CNx film on silicon substrate

Fu, T. / Zheng, Y. / Shen, Y. G.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Interface structure of sputter deposited CNx film on silicon substrate

Contributors:

Fu, T. (author) / Zheng, Y. (author) / Shen, Y. G. (author)

Published in:

MATERIALS LETTERS ; 62 ; 2685-2687

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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