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Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

Qin, M. / Poon, V. M. C.

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Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

Qin, M. / Poon, V. M. C.

Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

Qin, M. / Poon, V. M. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

Contributors:

Qin, M. (author) / Poon, V. M. C. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 19 ; 2243-2246

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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