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    Capacitance of High-Voltage Coaxial Cable in Plasma Immersion Ion Implantation

    New search for: Tian, X. B.
    New search for: Wang, L. P.
    New search for: Kwok, D. T. K.
    New search for: Tang, B. Y.
    New search for: Chu, P. K.

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    Capacitance of High-Voltage Coaxial Cable in Plasma Immersion Ion Implantation

    New search for: Tian, X. B.
    New search for: Wang, L. P.
    New search for: Kwok, D. T. K.
    New search for: Tang, B. Y.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Capacitance of High-Voltage Coaxial Cable in Plasma Immersion Ion Implantation

    New search for: Tian, X. B.
    New search for: Wang, L. P.
    New search for: Kwok, D. T. K.
    New search for: Tang, B. Y.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Capacitance of High-Voltage Coaxial Cable in Plasma Immersion Ion Implantation

    Contributors:

    Tian, X. B. (author) / Wang, L. P. (author) / Kwok, D. T. K. (author) / Tang, B. Y. (author) / Chu, P. K. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 17 ; 41-42

    Publication date:

    2001-01-01

    Size:

    2 pages

    ISSN:

    1005-0302

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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