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Plasma-Immersion Ion Implantation

Mantese, J. V. / Brown, I. G. / Cheung, N. W. / Collins, G. A.

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Plasma-Immersion Ion Implantation

Mantese, J. V. / Brown, I. G. / Cheung, N. W. / Collins, G. A.

Plasma-Immersion Ion Implantation

Mantese, J. V. / Brown, I. G. / Cheung, N. W. / Collins, G. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Plasma-Immersion Ion Implantation

Contributors:

Mantese, J. V. (author) / Brown, I. G. (author) / Cheung, N. W. (author) / Collins, G. A. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 21 ; 52-57

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Dong, H. / Bell, T. / Blawert, C. et al. | British Library Online Contents | 2000

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Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

Manuaba, A. / Pinter, I. / Szilagyi, E. et al. | British Library Online Contents | 1997

Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]

Rajkumar / Kumar, M. / George, P. J. et al. | British Library Conference Proceedings | 2001