Determination of thicknesses and interface roughnesses of GaAs-based and InAs/AlSb-based heterostructures by X-ray reflectometry: Fid-Bau Portal

Determination of thicknesses and interface roughnesses of GaAs-based and InAs/AlSb-based heterostructures by X-ray reflectometry

Durand, O. / Berger, V. / Bisaro, R. / Bouchier, A. / De Rossi, A. / Marcadet, X. / Prevot, I.

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Determination of thicknesses and interface roughnesses of GaAs-based and InAs/AlSb-based heterostructures by X-ray reflectometry

Durand, O. / Berger, V. / Bisaro, R. / Bouchier, A. / De Rossi, A. / Marcadet, X. / Prevot, I.

Determination of thicknesses and interface roughnesses of GaAs-based and InAs/AlSb-based heterostructures by X-ray reflectometry

Durand, O. / Berger, V. / Bisaro, R. / Bouchier, A. / De Rossi, A. / Marcadet, X. / Prevot, I.

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Title:

Determination of thicknesses and interface roughnesses of GaAs-based and InAs/AlSb-based heterostructures by X-ray reflectometry

Contributors:

Durand, O. (author) / Berger, V. (author) / Bisaro, R. (author) / Bouchier, A. (author) / De Rossi, A. (author) / Marcadet, X. (author) / Prevot, I. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 327-330

Publication date:

2001-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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