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Scanning capacitance microscopy investigations of SiC structures

Bowallius, O. / Anand, S. / Nordell, N. / Landgren, G. / Karlsson, S.

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Scanning capacitance microscopy investigations of SiC structures

Bowallius, O. / Anand, S. / Nordell, N. / Landgren, G. / Karlsson, S.

Scanning capacitance microscopy investigations of SiC structures

Bowallius, O. / Anand, S. / Nordell, N. / Landgren, G. / Karlsson, S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Scanning capacitance microscopy investigations of SiC structures

Contributors:

Bowallius, O. (author) / Anand, S. (author) / Nordell, N. (author) / Landgren, G. (author) / Karlsson, S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 209-211

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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