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Scanning capacitance microscopy investigations of SiC structures
Scanning capacitance microscopy investigations of SiC structures
Scanning capacitance microscopy investigations of SiC structures
Bowallius, O. (Autor:in) / Anand, S. (Autor:in) / Nordell, N. (Autor:in) / Landgren, G. (Autor:in) / Karlsson, S. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 209-211
01.01.2001
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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