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Lifetime study in advanced isolation techniques

Poyai, A. / Simoen, E. / Claeys, C. / Rooyackers, R. / Badenes, G.

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Lifetime study in advanced isolation techniques

Poyai, A. / Simoen, E. / Claeys, C. / Rooyackers, R. / Badenes, G.

Lifetime study in advanced isolation techniques

Poyai, A. / Simoen, E. / Claeys, C. / Rooyackers, R. / Badenes, G.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Lifetime study in advanced isolation techniques

Contributors:

Poyai, A. (author) / Simoen, E. (author) / Claeys, C. (author) / Rooyackers, R. (author) / Badenes, G. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 137-139

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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