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Simulation of scanning capacitance microscopy measurements on micro-sectioned and bevelled n+-p samples
Simulation of scanning capacitance microscopy measurements on micro-sectioned and bevelled n+-p samples
Simulation of scanning capacitance microscopy measurements on micro-sectioned and bevelled n+-p samples
Ciampolini, L. (author) / Giannazzo, F. (author) / Ciappa, M. (author) / Fichtner, W. (author) / Raineri, V. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 85-88
2001-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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