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Tribology of MEMS

de Boer, M. P. / Mayer, T. M.

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Tribology of MEMS

de Boer, M. P. / Mayer, T. M.

Tribology of MEMS

de Boer, M. P. / Mayer, T. M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tribology of MEMS

Contributors:

de Boer, M. P. (author) / Mayer, T. M. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 26 ; 302-304

Publication date:

2001-01-01

Size:

3 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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