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    Silicon oxide in Si&z.sbnd;Si bonded wafers

    New search for: Himcinschi, C.
    New search for: Milekhin, A.
    New search for: Friedrich, M.
    New search for: Hiller, K.
    New search for: Wiemer, M.
    New search for: Gessner, T.
    New search for: Schulze, S.
    New search for: Zahn, D. R.

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    Silicon oxide in Si&z.sbnd;Si bonded wafers

    New search for: Himcinschi, C.
    New search for: Milekhin, A.
    New search for: Friedrich, M.
    New search for: Hiller, K.
    New search for: Wiemer, M.
    New search for: Gessner, T.
    New search for: Schulze, S.
    New search for: Zahn, D. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Silicon oxide in Si&z.sbnd;Si bonded wafers

    New search for: Himcinschi, C.
    New search for: Milekhin, A.
    New search for: Friedrich, M.
    New search for: Hiller, K.
    New search for: Wiemer, M.
    New search for: Gessner, T.
    New search for: Schulze, S.
    New search for: Zahn, D. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Silicon oxide in Si&z.sbnd;Si bonded wafers

    Contributors:

    Himcinschi, C. (author) / Milekhin, A. (author) / Friedrich, M. (author) / Hiller, K. (author) / Wiemer, M. (author) / Gessner, T. (author) / Schulze, S. (author) / Zahn, D. R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 175-176 ; 715-720

    Publication date:

    2001-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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