The electrical properties of MIS capacitors with ALN gate dielectrics: Fid-Bau Portal

The electrical properties of MIS capacitors with ALN gate dielectrics

Adam, T. / Kolodzey, J. / Swann, C. P. / Tsao, M. W. / Rabolt, J. F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

The electrical properties of MIS capacitors with ALN gate dielectrics

Adam, T. / Kolodzey, J. / Swann, C. P. / Tsao, M. W. / Rabolt, J. F.

The electrical properties of MIS capacitors with ALN gate dielectrics

Adam, T. / Kolodzey, J. / Swann, C. P. / Tsao, M. W. / Rabolt, J. F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

The electrical properties of MIS capacitors with ALN gate dielectrics

Contributors:

Adam, T. (author) / Kolodzey, J. (author) / Swann, C. P. (author) / Tsao, M. W. (author) / Rabolt, J. F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 175-176 ; 428-435

Publication date:

2001-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Pan, T. M. / Yen, L. C. | British Library Online Contents | 2010

Structural properties and electrical characteristics of high-k Dy2O3 gate dielectrics

Pan, T. M. / Chang, W. T. / Chiu, F. C. | British Library Online Contents | 2011

Photoactive Gate Dielectrics

Shen, Q. / Wang, L. / Liu, S. et al. | British Library Online Contents | 2010

Electrical characterization of high-k gate dielectrics on semiconductors

Ma, T. P. | British Library Online Contents | 2008

High-k gate dielectrics

British Library Online Contents | 2004