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Target morphology dependence of the particulate generation during excimer laser ablation of polytetrafluoroethylene
Target morphology dependence of the particulate generation during excimer laser ablation of polytetrafluoroethylene
Target morphology dependence of the particulate generation during excimer laser ablation of polytetrafluoroethylene
Smausz, T. (author) / Kresz, N. (author) / Hopp, B. (author)
APPLIED SURFACE SCIENCE ; 177 ; 66-72
2001-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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