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    Excimer laser ablation of aluminum nitride

    New search for: Lumpp, J. K.
    New search for: Allen, S. D.

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    Excimer laser ablation of aluminum nitride

    New search for: Lumpp, J. K.
    New search for: Allen, S. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Excimer laser ablation of aluminum nitride

    New search for: Lumpp, J. K.
    New search for: Allen, S. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Excimer laser ablation of aluminum nitride

    Contributors:

    Lumpp, J. K. (author) / Allen, S. D. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 218-225

    Publication date:

    1997-01-01

    Size:

    8 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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