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    Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

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    New search for: Meng, Y. G.
    New search for: Wen, S. Z.

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    Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

    New search for: Ding, J. N.
    New search for: Meng, Y. G.
    New search for: Wen, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

    New search for: Ding, J. N.
    New search for: Meng, Y. G.
    New search for: Wen, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

    Contributors:

    Ding, J. N. (author) / Meng, Y. G. (author) / Wen, S. Z. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 83 ; 42 - 47

    Publication date:

    2001-01-01

    Size:

    6 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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