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Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
Guillot, J. (author) / Fabreguette, F. (author) / Imhoff, L. (author) / Heintz, O. (author) / Marco de Lucas, M. C. (author) / Sacilotti, M. (author) / Domenichini, B. (author) / Bourgeois, S. (author)
APPLIED SURFACE SCIENCE ; 177 ; 268-272
2001-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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