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Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
Guillot, J. (Autor:in) / Fabreguette, F. (Autor:in) / Imhoff, L. (Autor:in) / Heintz, O. (Autor:in) / Marco de Lucas, M. C. (Autor:in) / Sacilotti, M. (Autor:in) / Domenichini, B. (Autor:in) / Bourgeois, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 177 ; 268-272
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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