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Plasma pretreatments for Cu-MOCVD

Park, W. / Lee, C.

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Plasma pretreatments for Cu-MOCVD

Park, W. / Lee, C.

Plasma pretreatments for Cu-MOCVD

Park, W. / Lee, C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Plasma pretreatments for Cu-MOCVD

Contributors:

Park, W. (author) / Lee, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 85 ; 80 - 84

Publication date:

2001-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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