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Characterization of sputter deposited cBN-films by low energy electron loss spectroscopy LEELS
Characterization of sputter deposited cBN-films by low energy electron loss spectroscopy LEELS
Characterization of sputter deposited cBN-films by low energy electron loss spectroscopy LEELS
Oechsner, H. (author) / Westermeyr, S. (author) / Ye, J. (author)
APPLIED SURFACE SCIENCE ; 179 ; 89-95
2001-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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