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Chemical Nanolithography with Electron Beams
Chemical Nanolithography with Electron Beams
Chemical Nanolithography with Electron Beams
Golzhauser, A. (author) / Eck, W. (author) / Geyer, W. (author) / Stadler, V. (author) / Weimann, T. (author) / Hinze, P. (author) / Grunze, M. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 13 ; 806-809
2001-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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