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    Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

    New search for: Goswami, J.
    New search for: Wang, C.-G.
    New search for: Majhi, P.
    New search for: Shin, Y.-W.
    New search for: Dey, S. K.

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    Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

    New search for: Goswami, J.
    New search for: Wang, C.-G.
    New search for: Majhi, P.
    New search for: Shin, Y.-W.
    New search for: Dey, S. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

    New search for: Goswami, J.
    New search for: Wang, C.-G.
    New search for: Majhi, P.
    New search for: Shin, Y.-W.
    New search for: Dey, S. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

    Contributors:

    Goswami, J. (author) / Wang, C.-G. (author) / Majhi, P. (author) / Shin, Y.-W. (author) / Dey, S. K. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 2192-2195

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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